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research-article

Description and evaluation of a simplified model to simulate the optical behavior of an angle-resolved scattered light sensor

[+] Author and Article Information
Francois M. Torner

Graduate Research Assistant, Institute for Measurement and Sensor-Technology Technical University Kaiserslautern Kaiserslautern, Rhenania-Palatinate 67663, Germany
torner@mv.uni-kl.de

Gerhard Stelzer

Institute for Measurement and Sensor-Technology Technical University Kaiserslautern Kaiserslautern, Rhenania-Palatinate 67663, Germany
stelzer@mv.uni-kl.de

Lukas Anslinger

Graduate Research Assistant, Institute for Measurement and Sensor-Technology Technical University Kaiserslautern Kaiserslautern, Rhenania-Palatinate 67663, Germany
anslinger@mv.uni-kl.de

Jörg Seewig

Institute for Measurement and Sensor-Technology Technical University Kaiserslautern Kaiserslautern, Rhenania-Palatinate 67663, Germany
seewig@mv.uni-kl.de

1Corresponding author.

ASME doi:10.1115/1.4034386 History: Received March 07, 2016; Revised July 27, 2016

Abstract

Scattered light sensors are optical sensors commonly used in industrial applications. They are particularly well suited to characterizing surface roughness. In contrast to most geometric measuring devices, a scattered light sensor measures reflection angles of surfaces according to the principle of the so-called mirror facet model. Surfaces can be evaluated based on the statistical distribution of the surface angles, meaning the gradients. To better understand how the sensor behaves, it is helpful to create a virtual model. Ray tracing methods are just as conceivable as purely mathematical methods based on convolution. The mathematical description is especially interesting because it promotes fundamental comprehension of angle-resolved scattered light measurement technology and requires significantly less computation time than ray tracing algorithms. Simplified and idealized assumptions are accepted. To reduce the effort required to simulate the sensor, an attempt was made to implement an idealized mathematical model using Matlab® to be able to quickly generate information on scattered light distribution without excessive effort. Studies were conducted to determine the extent to which the results of modeling correspond to the transfer characteristics of a virtual Zemax© sensor on the one hand and with the measurement results of the actual scattered light sensor on the other.

Copyright (c) 2016 by ASME
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