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TECHNICAL PAPERS

An Efficient Geometric Algorithm For Extracting Structural Elements to Facilitate Automated MEMS Extraction

[+] Author and Article Information
S. Bellam, S. K. Gupta

Mechanical Engineering Department and Institute for Systems Research, University of Maryland, College Park, MD 20742

J. Comput. Inf. Sci. Eng 3(2), 155-165 (Jun 30, 2003) (11 pages) doi:10.1115/1.1576429 History: Received October 01, 2001; Revised January 01, 2003; Online June 30, 2003
Copyright © 2003 by ASME
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References

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Figures

Grahic Jump Location
Illustration for Condition 1 of Proposition 2A; (a) Shows the primary rectangle before atomization; (b) In an attempt to combine rectangles r & r, belonging to the same primary rectangle as indicated in the figure to the left. We notice the inconsistency of the edge states hence combination is not possible.
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Performance of the implemented algorithm
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Indexing scheme used to represent structural elements
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Extraction for Resonator; (a) Input layout; (b) atomic representation; (c) extracted layout
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Extraction for Gyroscope; (a) Input layout; (b) Extracted layout
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Illustration for Condition 2 of Proposition 2A; (a) Shows the primary rectangle before atomization; (b) In an attempt to combine rectangles r & r, the edges of r belong to the Atomic Edge set of the primary rectangle to which rectangle r belongs. Hence, It is not possible to combine r & r
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Illustration for Condition 3 of Proposition 2A; (a) Shows the primary rectangle before atomization; (b) r is a primary rectangle, r belongs to the primary rectangle shown in (a). The edges of r belong to r’s primary rectangle’s Atomic Edge Set
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Close up of Z-Accelerometer
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Use of Extraction in MEMS Design
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Examples of Atomic and Non Atomic Rectangles
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Illustration of Atomizing Edges
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Structural Elements in MEMS
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Alternative representations that can be used for the same layout
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Illustration of Step 2a-f
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Illustration for Proposition 2B; (a) Shows the primary rectangle before atomization; (b): r and r belong to the same primary rectangle. Rectangle s’s edges belong to the atomic edge set of the primary rectangle.
Grahic Jump Location
Illustration for Proposition 2B; (a) Shows the primary rectangle before atomization; (b) r and s belong to the same primary rectangle. Edges of rectangle r belong to the atomic edge set of the primary rectangle.
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Extraction of Structural Elements
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Recognizing Split Beams

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