0
TECHNICAL PAPERS

An Efficient Geometric Algorithm For Extracting Structural Elements to Facilitate Automated MEMS Extraction

[+] Author and Article Information
S. Bellam, S. K. Gupta

Mechanical Engineering Department and Institute for Systems Research, University of Maryland, College Park, MD 20742

J. Comput. Inf. Sci. Eng 3(2), 155-165 (Jun 30, 2003) (11 pages) doi:10.1115/1.1576429 History: Received October 01, 2001; Revised January 01, 2003; Online June 30, 2003
Copyright © 2003 by ASME
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Close up of Z-Accelerometer
Grahic Jump Location
Use of Extraction in MEMS Design
Grahic Jump Location
Examples of Atomic and Non Atomic Rectangles
Grahic Jump Location
Illustration of Atomizing Edges
Grahic Jump Location
Structural Elements in MEMS
Grahic Jump Location
Alternative representations that can be used for the same layout
Grahic Jump Location
Illustration of Step 2a-f
Grahic Jump Location
Illustration for Condition 1 of Proposition 2A; (a) Shows the primary rectangle before atomization; (b) In an attempt to combine rectangles r & r, belonging to the same primary rectangle as indicated in the figure to the left. We notice the inconsistency of the edge states hence combination is not possible.
Grahic Jump Location
Illustration for Condition 2 of Proposition 2A; (a) Shows the primary rectangle before atomization; (b) In an attempt to combine rectangles r & r, the edges of r belong to the Atomic Edge set of the primary rectangle to which rectangle r belongs. Hence, It is not possible to combine r & r
Grahic Jump Location
Illustration for Condition 3 of Proposition 2A; (a) Shows the primary rectangle before atomization; (b) r is a primary rectangle, r belongs to the primary rectangle shown in (a). The edges of r belong to r’s primary rectangle’s Atomic Edge Set
Grahic Jump Location
Illustration for Proposition 2B; (a) Shows the primary rectangle before atomization; (b): r and r belong to the same primary rectangle. Rectangle s’s edges belong to the atomic edge set of the primary rectangle.
Grahic Jump Location
Illustration for Proposition 2B; (a) Shows the primary rectangle before atomization; (b) r and s belong to the same primary rectangle. Edges of rectangle r belong to the atomic edge set of the primary rectangle.
Grahic Jump Location
Extraction of Structural Elements
Grahic Jump Location
Recognizing Split Beams
Grahic Jump Location
Performance of the implemented algorithm
Grahic Jump Location
Indexing scheme used to represent structural elements
Grahic Jump Location
Extraction for Resonator; (a) Input layout; (b) atomic representation; (c) extracted layout
Grahic Jump Location
Extraction for Gyroscope; (a) Input layout; (b) Extracted layout

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In